SEMI S10 — Risk Assessment
SEMI S10 describes a structured process for identifying hazards, estimating and evaluating risk, selecting controls, and documenting residual risk for semiconductor manufacturing equipment.
Area
Safety
Profile coverage
300 mm Overhead Automation
Purpose
S10 supports consistent safety decisions by making assumptions, severity, likelihood, controls, and verification explicit. It is a process guideline rather than an automation interface or runtime state machine.
Where it applies
Use the current S10 process when required by the customer, assessor, or equipment safety program. It can cover process tools and AMHS equipment, including overhead movement, maintenance access, stored energy, and software-controlled hazards.
Who implements it
A cross-functional team with appropriate safety competence performs and maintains the assessment. Engineering owners implement controls and verification; equipment users provide site, task, and operational context.
Relationships and dependencies
- Supports the broader equipment EHS objectives referenced by S2.
- Can evaluate electrical hazards and controls addressed by S22.
- Can evaluate automated vehicle and overhead transport hazards addressed by S17.
Practical implementation guidance
- Assess normal operation, setup, service, fault recovery, foreseeable misuse, and lifecycle transitions.
- Prefer controls that remove or reduce hazards before relying on warnings or procedures.
- Link each credited control to an owner, implementation, verification method, and change-control trigger.
Common mistakes
- Assigning numbers without documenting the scenario and evidence behind them.
- Ignoring software update, bypass, remote-control, and recovery modes.
- Closing the assessment before verifying that credited controls work in the integrated equipment.