Free engineering resources for SECS/GEM developers, semiconductor equipment software engineers, controls engineers, and factory automation professionals.
Built like a reference library for equipment software — expandable topic by topic, message by message, standard by standard.
Core standards explorer
Select any standard name in a diagram—or use the linked list beneath it—to open a practical explainer covering purpose, scope, responsibilities, relationships, and implementation concerns.
These diagrams show common adoption profiles, not universal wafer-size requirements. The current fab specification, purchased SEMI documents, equipment function, and agreed supplier responsibilities control every implementation.
Profile 1 · Communications foundation
A practical modern SECS/GEM foundation: SECS-II message content, GEM equipment behavior, and HSMS network transport. E4 remains relevant where an installed factory requires legacy serial transport.
Profile 2 · GEM300 equipment automation
The communications foundation plus a focused GEM300 core for host-visible objects, process jobs, carriers, substrates, and control jobs.
SEMI E5 SECS-IISEMI E30 GEMSEMI E37 HSMSSEMI E39 Object ServicesSEMI E40 Processing ManagementSEMI E87 Carrier ManagementSEMI E90 Substrate TrackingSEMI E94 Control Job ManagementProfile 3 · Tool and AMHS ecosystem
An ecosystem view that adds local carrier-handoff and AMHS equipment models around a GEM300 process tool, with common safety references for overhead transport projects.
SEMI E5 SECS-IISEMI E30 GEMSEMI E37 HSMSSEMI E39 Object ServicesSEMI E40 Processing ManagementSEMI E87 Carrier ManagementSEMI E90 Substrate TrackingSEMI E94 Control Job ManagementSEMI E84 Carrier HandoffSEMI E82 IBSEMSEMI E88 Stocker SEMSEMI S17 UTV SafetySEMI S2 Equipment EHSSEMI S10 Risk AssessmentSEMI S22 Electrical Design SafetyFab system context
Automated material handling is a factory-wide ecosystem, not a single machine. This overview identifies common transport, storage, load-port, purge, operator, and support equipment found around semiconductor production tools.
OHT and mobile-robot systems move carriers between stockers, buffers, and production equipment. E82 describes a host-facing model for qualifying AMHS transport equipment.
Stockers and near-tool buffers stage material. E88 addresses stocker equipment, while E84 coordinates the local carrier handoff at applicable equipment boundaries.
Overhead movement, suspended loads, maintenance access, electrical systems, and recovery procedures require coordinated equipment and fab safety engineering.
Standards and selected fundamentals topics are published now. Remaining sections stay visible as a roadmap and link as substantive original content is added.
Learn how GEM works.
Foundational concepts for SECS/GEM developers — how equipment and hosts communicate, and the building blocks every tool control engineer needs.
Topics include
Complete reference for every SECS/GEM message.
SxFy message families used in everyday equipment software. Each stream will grow into its own engineering reference page.
Future pages include
Practical equipment, GEM300, AMHS, and safety profiles with sourced explainers.
Explore three adoption profiles, then open original educational summaries for all 16 named standards. Fab specifications and equipment scope always determine applicability.
Published standard explainers
Hands-on paths for building real equipment software.
Step-by-step tutorials written for software engineers implementing SECS/GEM on production tools.
Future tutorials
Tools, samples, and checklists for the bench.
Engineering downloads that support development, testing, and training—starting with SecsHost 1.0.
Future downloads
Real engineering writing — not marketing posts.
Articles from practitioners who build semiconductor equipment software: architecture, modernization, and field lessons.
Future articles
Search documentation, engineering notes, alarms, SECS/GEM messages, and implementation knowledge using KodeGEM Intelligence.
KodeGEM provides professional consulting for:
