SEMI E90 — Substrate Tracking
SEMI E90 defines a consistent host-visible model for substrate identity, location, state, and movement through equipment, from carrier slots through internal handling and processing locations.
Area
GEM300
Profile coverage
300 mm Tool Standards · 300 mm Overhead Automation
Purpose
E90 gives the host traceable evidence of where each substrate is and how it moved. It bridges factory material identity with the equipment’s robots, aligners, buffers, process modules, and carrier locations.
Where it applies
Use E90 where the factory requires GEM300 substrate tracking. The equipment must map the standard model onto its real material path, including batch or single-substrate behavior and any internal locations relevant to production.
Who implements it
The equipment is authoritative for observed internal movement and reports state after physical actions are confirmed. The host associates factory identity and consumes movement and processing context for scheduling, traceability, and recovery.
Relationships and dependencies
- Uses E39 object concepts and builds on E30 GEM.
- Tracks substrates associated with E87 carriers.
- Provides material context to E40 process jobs and E94 control jobs.
Practical implementation guidance
- Create one canonical location model shared by robotics, process control, recovery, UI, and GEM reporting.
- Update identity and location atomically around confirmed physical transfers.
- Test missing, duplicate, cross-slotted, unknown, scrapped, and manually recovered substrates.
Common mistakes
- Reporting a destination before the robot and destination sensors confirm placement.
- Using different location names or identities in Tool Control Software and the GEM interface.
- Dropping substrate history during abort, recovery, or equipment restart.