SEMI E87 — Carrier Management
SEMI E87 models carriers and load ports, including carrier arrival, identification, slot-map verification, access, association, transfer state, and the host-visible services surrounding those activities.
Area
GEM300
Profile coverage
300 mm Tool Standards · 300 mm Overhead Automation
Purpose
E87 lets the factory verify that the expected carrier and material reached the expected load port before processing. Its state models create a consistent contract between physical carrier handling and host production decisions.
Where it applies
Use E87 on equipment whose factory interface requires GEM300 carrier management. The applicable behavior depends on external and internal ports, manual or automated loading, storage, mapping capability, and customer-defined verification policy.
Who implements it
The equipment owns load-port and observed carrier state and reports events based on physical behavior. The host supplies or verifies identity and content information and authorizes production according to factory policy.
Relationships and dependencies
- Builds on E39 object services and E30 GEM.
- Provides carrier context for E90 substrate tracking.
- Must remain consistent with E84 handoff and physical load-port state when automated handling is used.
Practical implementation guidance
- Define authoritative sources for carrier ID, slot map, presence, clamping, access mode, and transfer state.
- Sequence events only after related variables and object attributes are updated.
- Test manual load, automated load, wrong carrier, duplicate ID, map mismatch, removal, and recovery scenarios.
Common mistakes
- Equating an E84 handoff completion with completed E87 identification and verification.
- Allowing host and equipment carrier IDs to diverge after a read or verification failure.
- Starting a process job before required carrier and slot-map checks are complete.