SEMI E40 — Processing Management
SEMI E40 models process jobs: the material to process, the recipe or process program to apply, execution state, and host services used to create and control production work.
Area
GEM300
Profile coverage
300 mm Tool Standards · 300 mm Overhead Automation
Purpose
E40 separates a durable host-visible process request from lower-level module execution. This lets the host verify that the intended material is processed with the intended recipe and observe a defined process-job lifecycle.
Where it applies
Use E40 where the factory requires GEM300 process-job management. Equipment architecture, batching, parallel chambers, recipe selection, and customer scenarios determine how the standard maps onto internal scheduling and control.
Who implements it
The host requests and manages process jobs; the equipment validates them, maps them to real material and recipes, executes only legal transitions, and reports state and completion consistently.
Relationships and dependencies
- Uses E39 object services and builds on E30 GEM.
- Coordinates material identified through E87 and tracked through E90.
- Process jobs can be grouped and supervised by E94 control jobs.
Practical implementation guidance
- Define one authoritative mapping between process-job state and internal scheduler or module state.
- Validate material, recipe, resources, and permissions before accepting a job.
- Model abort, stop, pause, cancel, failure, restart, and partial-completion scenarios before FAT.
Common mistakes
- Reporting a job started before material and recipe validation is complete.
- Treating process jobs as transient commands rather than stateful host-visible objects.
- Leaving control-job and process-job state inconsistent after an equipment fault.