SEMI E94 — Control Job Management
SEMI E94 defines control jobs that supervise one or more process jobs, their execution order, material selection, and post-processing destination within a GEM300 equipment interface.
Area
GEM300
Profile coverage
300 mm Tool Standards · 300 mm Overhead Automation
Purpose
E94 gives the factory a higher-level production object for coordinating process jobs and material flow. It supports host supervision of more complex execution than an isolated recipe-start command.
Where it applies
Use E94 when the customer requires control-job management in conjunction with E40 process jobs. Equipment scheduling, parallel resources, material return or sorting rules, and factory control policy determine the detailed scenarios.
Who implements it
The host creates and directs control jobs within permitted services. The equipment validates dependencies, coordinates associated process jobs and material, reports state, and keeps all related objects consistent through completion or failure.
Relationships and dependencies
- Depends on E40 process-job management.
- Uses E39 object services and E30 GEM.
- Coordinates material represented through E87 carrier and E90 substrate models.
Practical implementation guidance
- Define control-job, process-job, material, and scheduler transitions as one coordinated state model.
- Validate all referenced jobs, material, recipes, and destinations before accepting execution.
- Test sequential and parallel work, pause, stop, abort, cancel, partial failure, and restart recovery.
Common mistakes
- Treating a control job as a duplicate name for a process job.
- Completing the control job while associated process jobs or material movement remain active.
- Allowing internal scheduling decisions to violate host-visible ordering or destination rules.