SEMI E88 — Stocker SEM
SEMI E88 defines a host-visible specific equipment model for automated material handling storage equipment, including stocker controller, transfer command, carrier, crane, state, alarm, event, and reporting behavior.
Area
AMHS
Profile coverage
300 mm Overhead Automation
Purpose
E88 gives factory automation a consistent way to command and monitor stocker storage operations. It focuses on the stocker as AMHS equipment rather than defining the internal mechanical implementation.
Where it applies
Use E88 for stocker equipment required to expose the Stocker SEM. It is optional in the illustrated overhead profile because a process tool or transport segment does not necessarily include or control a stocker.
Who implements it
The stocker controller implements the equipment model and executes valid storage and transfer commands. The factory host schedules moves and observes state. Connected transport and process equipment coordinate at their own defined interfaces.
Relationships and dependencies
- Assumes E30 GEM and E5 SECS-II behavior on the stocker interface.
- Complements E82 transport equipment within an AMHS architecture.
- May use E84 or another specified handoff interface at physical transfer boundaries.
Practical implementation guidance
- Model storage locations, carriers, transfer commands, and crane activity with explicit ownership and recovery rules.
- Keep host-visible inventory synchronized with physical sensors and independent inventory controls.
- Test full destinations, unavailable locations, interrupted transfers, restart reconciliation, and duplicate commands.
Common mistakes
- Applying E88 to a process tool simply because that tool receives carriers from an AMHS.
- Marking inventory moved before the physical transfer and destination confirmation are complete.
- Recovering a failed command without reconciling carrier location and command ownership.